Singapore National day Tomorrow is 9 Aug and will be Singapore 56th birthday ! So tomorrow will be a public holiday, linking with this weekend forming the long weekend ! Apart from this good news of having long weekend, another good news brought by the Singapore Government was to open dine-in for 2 person at food court and restaurant! there are more relaxing rule for those fully vaccinated but for me , the uplift ban of dine-in already a super good news for me as I can enjoy…
@technician in August 2021
Equipment Issue during shift -HV standby error/HV range error during 4 layers process. -Error during Cr initial ramping power, wafers in chamber. -Checked HV triode tube glowing. -Checked plug-in PCB U2, U3 and U5 power supply board. -contact cleaned U2 and U3 PCB. -Measured +-15Vdc and 24Vdc from ext PS ok. -Tested HV standby ok but HV range error persisted -Coil current ok. reset EEC300 controller -ve. -Disconnected HV from red box to isolate chamber -ve. To continue.…
SF issue for machine Today we had this problem, so SF issue (suspect substrate issue) follow up passdown are as below: Need to do surf scan for wafers placed on F3X1 rack at 01:15 AM and share results with XL to compile report. All result with increasing trend especially for slot 01# but the defects count still within SPEC.Pls continue monitor one more time end of night shift. Tomorrow we will review the result and decide whether still need to monitor or not As per discussed…
Unscheduled events We have a lot of cases that the profiling always turn black(the plate attached to it). Temporary action: 1. No Maint is allowed to touch the profiling coil setting. 2. Only Alan is allowed to do this changes. Visual check on EPR06 & EPR11 Profiling Coil Condition ------------------------------------------------------ Do view attcahed pictures BELL B ALARM (Yesterday Issue) - if there's re-occurance, kindly replace the +15mBar Pressure Switch Meeting…
Problematic day with many issues Machine 52 is having error 60,found loose nut on cylinder.So Adjust cylinder stroke and tigthen nut. dummy run,ok Machine is having 04-etchrate and uniformity fail. Have checked acutal RF with bird meter from PVD rf within specs at 207watts. found heater lamp halogen bulb blown. replaced and tested ok. Machine 05 haivng -handling error. Due to left swivel vacuum drop and right fork place position sensor holder loose.We replaced pinched vacuum…
Leak check Today I wanna share a skill that we technician need to master- **Load Lock Hi-vac Leak Check.** Firstly, Pump down chamber to base pressure. <2.0 x 10e-6 Torr. (Under “Equipment Operations” menu. Select “Wafer Movement” and press “Rotate one” press “Yes” to confirm.) **Secondly s**elect “Vacuum Map” and close Load Lock Cryo Hi-Vac valve and L/L Diff Pump valve.(Open “N2 Vent Valve”. chamber pressure must be <3.0x10e-6 in 1 min. Change Load Lock Hi-Vac valve if…
All Stations Target Change step by step Quantum Source (PCW) Purging Procedure. (All Stations Target Change) Below is the diagram of whole machine: **First,** Disconnect motor power connector for all stations. Disconnect drain line from pressure relief quick release fitting and connect to drain quick release fitting for all stations. Secondly, Open drain ball valve & Install purge hose assembly. Ensure purge manual valve is closed. Thirdly, Turn off PCW Supply ball valve.…
Tiring friday Yet another tiring day , here I share what I and team did in the day LP01 (1900 ~ 2050) Mthly PM follow up by Goh. Run 1 lot of conditioning done. Qual,E/r check passed 5377, del 01.75 % . PAR:11/ & 12/1 counts. Performed 5S done.Point check. & Tencor check by Engineer pass. LA1B (2100 ~ 0615) It was Down For Max run + SFG s/h change PM Done by Goh. Process chamber wet clean done. Scrub process chamber with green wool. Upper and lower baffles wet clean done.…
Monday blue with 3 issues Today Monday blue , and I have 3 main issues to attend: Issue 1: Please send the remaining CIV913 EWS Rework wafers to do the following rework: 1. BTRECYLE.->Done. 2. Send for Irradiation using Irradiation dosage 18.0KGY-> Done assign 18KGY. 3. Written on runsheet to hold before Annealing to perform measure initial Tx and sample Anneal 2pcs for 10mins at 350degC. 4. Measure 2nd Tx and EWS HFE condition. HFE@500mA/5V,spec:36.5-63.5;…
Busy work here and there To confirm RS no drift. Today we did many stuffs: <In all Auto-switch event onwards, to arrange the measurement for the GBT RS measurement that the run is processed 3hrs AFTER A/S and 6S9 RS measurement that the run is processed 6hrs AFTER A/S.> E.g. 8am A/S happened, measure the IGBT run processed at ~~11am and 6S9 run processed at~~ 2pm. Not sure, pls verify with Nani. PROCESS Alignment: 1. For all loading issue, add the loading op ID here to…
Deep shit in machine and temporary solution The machine 01 is running into problem, so me and teammate came out a temporary solution to contain the problem. 1. Mask contact level need to run with batch by poly cells.Do sample when change batch. Zcell05 and Zcell18 one batch. Zcell20, ZCELL21 one batch Zcell22 one batch. 2. Zcell22: Ban Gen-3 metal due to CD unstable 3. Zcell18: Ban Tanis poly due to Bin8,9 loss, pending further investigation. 4. Zcell23: Coater unit 3 motor…
Engineering work for problematic production lots Today have to continue to sweep the dust Engineering work for problematic production lots: XX40 OOS lot disposition need full lot measurement. Many of you may know XX40 OOS lot disposition need 100% measurement. If any lot encounter OOS for CD and thickness, pls sort wafers and do all 25 wafers measurement before move lot to next level. We may have more OOS due to contact ROX bring down. I need team help to do 100% measurement…
Relocation filled my day today Relocation project progress as below : R11923 Sx reallocation during PM today. To refer to check list for tool qualification (refer to Oh emails in details). Already printed out hard copy of qualification check list . Pls follow accordingly Test run with 20mins ( SX set as 5,10, 15) to cover GR from 0.869 to 1.548 m/min. R11923B test run with 20mins ( SX set as 5,10, 15) to cover GR from 0.850 to 1.494 m/min. Updated Etcher and treatment recipe…
Full loaded friday People said TGIF, but here is diffferent, all are loaded heavily. Show you list of issues: PROBER RELATED ISSUE FOLLOW UP: 1) TREB14 - DOWN MAINT - Handler recovery error ON & OFF for 2BO thin wafer - trouble shoot by prober tech , pls follow up. PROBE CARD ISSUE FOLLOW UP: 1) Probe Cards are P.V Rack after repaired and wash/check due to fail. Please push these probe cards for production and confirm status. MRT06031 - COMMAN MRT05119 - 6A MRT11094 - GD50BE…
Engineering problem during weekend Engineering issues that we faced last 2 days , Too many until the width of page may not enough to write: 1.) 8" BRE6: Residue Issue at EM layer (LOT # START WITH "C") Do not rework any BCD lot for resist residue until further notice. If AIT send for rework, pls inform PO or hold until morning. Refer to email sent by Kelvin regarding rework. AIT will hold the lot if residue counts>30 and etching will manual rework. If resist residue <30…
Smooth start of the week Today a smooth start of a week, line issues are manageable: Chamber Pins moved UP TOO Fast - Right Chamber wafer broken when clearing wafer calibrated lifter pin speed replaced the lifter pin cda regulator while clearing the prod wafer, had an alarm of robot extension error, robot pan was extended on right chamber hitting the slanted wafer on chuck suspect wafer move/slide while calibrating the speed of lifter pin unable to clear wafer due to lifter…
Smooth problem resolved Today is quite productive in a way - many issues able to resolve one by one: SPC HOLD ================ Tool spc hold. MGGGW625 step back to remeasure. and 2EWB22 done ER. Uv tool down while measuring er wafer.wait for uv tool to up to measure er. Lot step back and remeasure thickness within ctrl. No issue with uv tool when observed, compared with nanospec thkness comparable. ER high, temp verified actual 22.5 bth edge and center. Display 22.5C. Flow…
Projects status up to date Today we had a long meeting for progress of the whole year projects: • **87 Qualifications remaining** : • On time execution + analysis & anticipation/ back-up plan -> missed out items lessons learnt (qual task, scopes, semitool link missed out etc ..) • **G4 closure**: • PR event link / flexibility follow up • Rack ID change on time • Staffing model & training anticipation • **6 Tools shutdown on time** • Line audit • Shutdown or decontamination…