Tiring friday

Yet another tiring day , here I share what I and team did in the day   LP01 (1900 ~ 2050)                                                            Mthly PM follow up by Goh. Run 1 lot of conditioning done. Qual,E/r check passed 5377, del 01.75 %  . PAR:11/ & 12/1 counts.                                                       Performed 5S done.Point check. & Tencor check by Engineer pass.                                                                                                                                                                                                                 LA1B (2100 ~ 0615)                                                             It was Down For Max run + SFG s/h change PM Done by Goh.                                                                   Process chamber wet clean done. Scrub process chamber with green wool. Upper and lower baffles wet clean done.                                         Replaced s/h inner and outer o-ring. Replaced all screws and inserter & SFG silicon electrode. Replaced all ceramic parts                                                       Gap Parallelism check done. Replaced endpoint o-ring. Replaced helium clamp and vespel ring.                                           Closed and pump down chamber & done. Check all parameter done. Gap cal, no adjusted.                                                            Quals:                                                                          # L/r :5.00 mt/min                                                              # E/r :4523,4429,4500,4539,4530=4504   Delta :110                               # Par :10/1 counts                                                               Performed 5'S done & M/C up for prod.