Weekend passdown for Wk33

Long weekend ahead , so prepare the passdown for line people to follow up:

In all Auto-switch event onwards, to arrange the measurement for the IGBT RS

measurement that the run is processed 3hrs AFTER A/S and RS measurement

that the run is processed 6hrs AFTER A/S.> E.g. 8am A/S happened, measure the

IGBT run processed at 11am and run processed at 2pm. If Not sure, pls verify with Engineer

PROCESS Alignment:

1. For all loading issue, add the loading op ID here to track. Ken will compile

and share with PROD team.

OOC due to Loading Issue:

R924A AVI failed due to wafer 21/22 loading issue. (Defects count 41/52)

R924B AVI failed due to wafer 01 loading issue. (Defects count 99)

2. For incoming issue, need to alert to previous module / relevant stakeholders

officially by email communication.

3. Do not use Profiler Coil for THK tuning and Do not use H2M for RES tuning.

4. For the qual results, need to be shared thru passdown OR email as official communication, not saved in common drive only.

5. For Back Transfer process, pls be reminded that the BT THK / DW qual is only

refer to F/L result. Test run result is not being considered <as per DPQ

system, we still need to key TR result> and team is working on APF system to

replace DPQ system.

NEW

6. For the intermittent loading issue, pls investigate the blackbox for the

lift down timing, life up timing and standby timing. Also, to check if the

operator did the wafer flat alignment at loading station OR at the workstation,

any PM activity for tool beside and etc. We will work out the package process

checklist for intermittent AVI OOC <based on fishbone analysis input>.

7. With immediate effect to stop any MFC Zeroing due to recent Res OOS case in

R919.

PROCESS ISSUES:

So far TC1 RS issue rate 50%.

- As per Whong we increased RS sampling from 1 sample/ day to 1 sample/shift for HU susceptor.

- Instructed above information to R908B/R931A/R928A EGA GUI and informed production.

- Gen 585 card has 52 fault code: 5=Serial watchdog No communication with Video

Keyboard; 2= Phase Sequence

- Video keyboard (VKB): Serial Watchdog Converter Error and Master and Slave

parameters (some) are not the same

- Reset the video keyboard and 585 card, still the same

- Aligned the VKB Master and Slave parameters , still the same

- Performed troubleshooting as per Gen Manual

- Wire continuity of Reactor to Gen RS232 cable - no OC, ok

- Wire continuity of HA142, HA141 & Gnd from VKB card 452.C2 to 436 to 585.C2 -

no OC, ok

- Check fuses for 452.C2 to 436 to 585.C2 - all ok

- Isolate VKB 452.C IC#13 JUN (timekeeper) using IC from spare card,

still the same, put back the orig

- Isolate 585 IC#24 (EPROM MEMORY) using IC from spare card, still the same,

put back the orig

- Measure VKB 450.3 pin 2-5 and 3-5:

> RS232 connector not inserted in the card: -12.24Vdc & -0.27Vdc

> RS232 connector inserted in the card: -10.69Vdc & -10.14Vdc

- Replaced the VKB 450.3 and 452.C card using old spare card- still same (old

card maybe faulty also)

- Put back original card for both and install back all original parameters

- Notice both R916 & R918 VKB 452.C card LED S0 & S1 is ON during idle

- Please continue to check and troubleshoot the 585 card

-Rotation shaft extend ipcrb R907 both side

- To do High Temp H2 leak check on BP/rotation and fill up the monitoring

checklist. Next monitoring date is 16/08/2017. Continue putting this and update

date follow up on passdown.

-Please help to fill up the R907 iCRB checklist located at: Checklist Rotation Shaft change from Half yearly to Yearly

B]R913 set up is priority over project. Once free, please follow up with start-

up checklist posted behind, on the machine gas panel cover.

C] R920 - Generator main breaker's relay temporarily bypassed

D] R926 - Generator main breaker's relay temporarily bypassed

E]HCL Fast command activation: to prepare 9pin-to-15pin cable; to plug-in to

Distributor I/O#3, J8 - (for R907, R908, R916, R919, R920, R921, R923, R926)