We have a lot of cases that the profiling always turn black(the plate attached to it).
Temporary action:
1. No Maint is allowed to touch the profiling coil setting.
2. Only Alan is allowed to do this changes.
Visual check on EPR06 & EPR11 Profiling Coil Condition
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Do view attcahed pictures
BELL B ALARM (Yesterday Issue)
- if there's re-occurance, kindly replace the +15mBar Pressure Switch
Meeting Highlights
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1. Was AS15 Left LL checked? Need to Rt>Lb ? (ASM arm) -ok
2. AS42 Top wafer drag-out. Need to Rt>Lb ? (ASM arm) -ok
3. R09B need to check Bell B Alarm Pressure Switch -not done-
(Remind in passdown to change pressure switch if re-occurance)
4. Check R11 Profiler Coil Condition -ok-
(No one except Alan authorized to make physical changes)
5. Thurs: AS801 & AS22 Arm Change -ok-
Had regen the all cryos. & Remove the source side,and clean the source housing.
Install bak al the new parts from rebuild.Put same source after rebuild.
Remove the beam guide and graphite.The graphite send to rebuild to sant blast.
Only Scrub AMU housing bottom side. Please follow up scrub the AMU housing top side.
