Yet another tiring day , here I share what I and team did in the day
LP01 (1900 ~ 2050)
Mthly PM follow up by Goh. Run 1 lot of conditioning done. Qual,E/r check passed 5377, del 01.75 % . PAR:11/ & 12/1 counts.
Performed 5S done.Point check. & Tencor check by Engineer pass.
LA1B (2100 ~ 0615)
It was Down For Max run + SFG s/h change PM Done by Goh.
Process chamber wet clean done. Scrub process chamber with green wool. Upper and lower baffles wet clean done.
Replaced s/h inner and outer o-ring. Replaced all screws and inserter & SFG silicon electrode. Replaced all ceramic parts
Gap Parallelism check done. Replaced endpoint o-ring. Replaced helium clamp and vespel ring.
Closed and pump down chamber & done. Check all parameter done. Gap cal, no adjusted.
Quals:
# L/r :5.00 mt/min
# E/r :4523,4429,4500,4539,4530=4504 Delta :110
# Par :10/1 counts
Performed 5'S done & M/C up for prod.
