Today a smooth start of a week, line issues are manageable:
Chamber Pins moved UP TOO Fast - Right Chamber wafer broken when clearing wafer
calibrated lifter pin speed replaced the lifter pin cda regulator while clearing the prod wafer, had an alarm of robot extension error, robot pan was extended on right chamber hitting the slanted wafer on chuck suspect wafer move/slide while calibrating the speed of lifter pin unable to clear wafer due to lifter pin alarm
after clearing the broken wafer and fixing lifter pin issue, cycled and checked
surfscan.
Both chamber failed so cleaned the loadlock and shuttle area. We checked again the surfscan, left side still failed @ 11/19. Right chamber pass.
We checked Left chamber Surfscan passed at 14/1. Also checked b/p and l/r passed.
run seasoing wafer. no alarm
Back chamber lifter pin move too fast alarm First, recover the wafer, checked lifter pin up/down speed is 0.8/1.6.
Next tune lifter up/down speed and run seasoing wafer no alarm
Observation Alarm 4626 THROTTLE VALVE SYSTEM ERROR.
Secured throttle valve wiring cable & Tighten throttle valve and baratron wiring connector. Check bp lr passed.
Test run dummies wafer monitoring no issue.
Throttle valve system error so we clear production wafers and reboot the tool and secure throttle valve interface card.
Verify bp & lr ok . Ran few lots of dummy wafes, no error occur
