SCADA system- real time gas pressure monitoring

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3 years ago
Topics: Work, Life

In semicon industry, there is a system for the facility team to monitor real time the gas pressure in each and every gas manifold and gas cylinder that they supply to the modules.

For instance, they supply Silane gas to certain machines, so the pressure will have to closely monitored by the SCADA system. If there is any abnormal thing happen, some action can be taken to prevent it from getting worse.

Below the screen on the SCADA.

If you want to zoom into any particular minute, you can do so by panning in.

And this chart only worrying, up and down up and down with so much magnitude. This will definitely affecting the product quality is the pressure and flow is not stable. This is by all means need to be avoided.

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3 years ago
Topics: Work, Life

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