Relocation filled my day today

Relocation project progress as below :

R11923

Sx reallocation during PM today. To refer to check list for tool qualification (refer to Oh emails in details). Already printed out hard copy of qualification check list . Pls follow accordingly

Test run with 20mins ( SX set as 5,10, 15) to cover GR from 0.869 to 1.548 m/min.                                              R11923B test run with 20mins ( SX set as 5,10, 15) to cover GR from 0.850 to 1.494 m/min.                                                         

Updated Etcher and treatment recipe for both side and arranged 2x1731 to target 1.45 GR using the SX setting from the graph. Updated result to team. Pls follow up 2x1731 TR result                                           

A side reduce Sx from 14g - 13.5g , GR= 1.48 ( expected to achieve ~1.43 from calculation BUT GR no response). B side reduce 14.5g to 14g, GR=1.453 ( GR drop from 1.48 to 1.453 – GR responding )

Redo test run GR stability on A side, if stable, can proceed F/L+SRP wait for result. If still not stable, to redo test run again to monitor growth rate stability. Follow up Intrinsic and SPV one side                               

B side SRP pass. Both side release prod as per Alex approval. A side do test run with Sx 14 ) Recipe: wwePMOSLTO_01_ENG) to verify GR vs run before using check GR result                                                    

As per Alexe redo TR check GR is 1.513 with source setting 14g and Conclude:                                                               

      - 1>Repeatedly test confirmed GR is stable.                           

      - 2>Discussed with Alex we suspect 1st TR with SX 14g high light in red

        one wrongly                                                             

      - As per discussed with Toh every run measure thickness to monitor GR     

        stability                                                          

      - Operator found R918B side quartz holder with white powder.             

      - Check bell jar found rainbow colour also.                              

      - Stop for maintenance do leak test and found leak from flexible hose.   

      - As per discussed with maintenance stop wash bell jar and quartz items 

      - Check B side last 2xruns AVI passed.                                   

      - Check A side last 2xruns AVI passeD.                                   

      - Checked B side last run under scope and collimated light no wafer haze 

        found.                                                                 

      - The last run hold back for Wong and Alex validate and confirm the      

        quality.