Machine 52 is having error 60,found loose nut on cylinder.So Adjust cylinder stroke and tigthen nut. dummy run,ok
Machine is having 04-etchrate and uniformity fail. Have checked acutal RF with bird meter from PVD rf within specs at 207watts. found heater lamp halogen bulb blown. replaced and tested ok.
Machine 05 haivng -handling error. Due to left swivel vacuum drop and right fork place position sensor holder loose.We replaced pinched vacuum tubing caused by bent vacuum pad as left fork hitting during transfer..
Adjusted rest position angle as its to0 high from 17 to 15.He resecured sensor holder on right fork side, ran cycle test ok.. handover to engr.
Machine 57 having surfscan issue. Have run test wafer reading is 325,98 small big respectively. Had purge n2 while cleaning the chuck.
Run test wafer 44,13 reading. Next adjust swivel loading and unload parameter.
Test run using test wafer passed 2x. Also run 1st surfscan wafer passed.
Please continue to run, need to pass 3 times due to ss hold and need to run oxide wafer for seapaged verification...
