Today Monday blue , and I have 3 main issues to attend:
Issue 1:
Please send the remaining CIV913 EWS Rework wafers to do the following rework:
1. BTRECYLE.->Done.
2. Send for Irradiation using Irradiation dosage 18.0KGY-> Done assign 18KGY.
3. Written on runsheet to hold before Annealing to perform measure initial Tx
and sample Anneal 2pcs for 10mins at 350degC.
4. Measure 2nd Tx and EWS HFE condition.
HFE@500mA/5V,spec:36.5-63.5; HFE@10mA/5V,spec:>26.5; HFE@2A/3V,spec:20-33.
5. Proceed to Anneal above lot condition meet for the 2 pcs sample anneal.
Issue 2:
OP2321 accidentally unload 50wfrs into 1 carrier due to forgot to chk unloading mode of JDMG01 after TM6L1B Anneal PSG. The mode was at 25wfrs during the unloading. Informed G3 surpervisor Markon. Done 100% AVI scan at Etch Contact.As per Ande, WML530730/DKL530923 moved out and done adv hold at Passivation to do 100% Tencor and MRB.
- Lot 1 done 100% tencor at PASSIVATION. Lot moved.
- Lot 2 done 100% tencor at PASSIVATION. Please inform operator to review wfr of hightest tencor cts. Hold for MRB (hold under 211RW, Operator unloading issue at Anneal PSG, to attend MRB). Pending tencor review LM25.
Issue 3:
defectivity < 50cts, to inkoff @ etch poly, no need to do rework, email ishairi and Andrew the lot id/wfr wfr id . For all poly rework pls perform 100% tencor scan at BARE-SI, GOX and POLY . Use ONLY fresh TW for CV/SPV. Do not send for reycle after use
For C23V163 adv hold for sample Tx, please consult Iseri on disposition. Do not hold lots due to no recipe linkage, to escalate to perform linkage. If any of main lots with WIT1 HFE low done additional measurement, pls key into rediff route first,can ask Gao Wei's help to decide on rediff timing
