In semicon indusctry , there is one sparepart that is very common in all department . That is Mass Flow Controller (MFC).
Function of the MFC is receiving the command from the computer , and open up the micro valve inside it and let the gas to flow through it.
Eg. if your process asks for 100 sccm Argon gas, then it will open up the valve and measure the difference of gas had gone through it.
MFC of different gas need to be calibrated using different formula. So in fact , it can last for quite long eg 10 years for stable gases eg Argon and Nitrogen.
And one for difference in MFC also could be the connector to it, most common will be the 9 pin type, but some also the card-edge as like below photo:
Hope you find it useful in understanding semicon field further.
