Machine Arm hang half way
Feedback by operator Alifu, when he proc wafer initially, there was no abnormality, timing and recipe was correct, he returned when the alarm sound was heard, signalling the qdr process end but instead he saw the arm on top of chemical tank.
Then lot on RHS (W3) of arm is inside the chem tank, Left hand side lot (W58) just hanging on the arm. he pressed stop process but the machine no response. He called maintenance & move arm manually to qdr side, but alignment/position not good.
We take lot & put in qdr, started manually -use carrier handler & took W53 in chemical tank & put inside qdr as well.
After qdr sent for std srd, on hold pending disposition. check machine/estar do not have record of any alarm. once maintenance reset the tool, the arm immediately recover. home position & chemical/qdr positions no problem. Maintenance running auto-qt to further test & chk if will recur.
W53 advance hold at etch met to perform sample. W58 hanged re-prime 5mins and advance hold at etch met incoming to perform sample.
Maintenance checked arm alignment at acid tank slightly out & adjusted encoder position .Previous data, QDR -480,0 ACID-7676,0 adjusted, -481,85 -7660,85.
Monitor so far so good.
