Today I wanna share a skill that we technician need to master- Load Lock Hi-vac Leak Check.
Firstly, Pump down chamber to base pressure. <2.0 x 10e-6 Torr. (Under “Equipment Operations” menu. Select “Wafer Movement” and press “Rotate one” press “Yes” to confirm.)
Secondly select “Vacuum Map” and close Load Lock Cryo Hi-Vac valve and L/L Diff Pump valve.(Open “N2 Vent Valve”. chamber pressure must be <3.0x10e-6 in 1 min. Change Load Lock Hi-Vac valve if pressure requirement is failed.)
Thirdly, under “Maintenance” menu select “Park System” and press “Park” to confirm. Load Lock Double O-ring Leak Check. Make sure Load Lock Cryo Hi-Vac valve leak check test is passed.
Following, Pump down chamber to base pressure <2.0 x 10e-6 Torr. (Under “Equipment Operations” Menu. Select “Wafer Movement” and press “Rotate one” press “Yes” to confirm.)
Select “Vacuum Map” and close Load Lock Cryo Hi-Vac valve. Open “N2 Vent Valve”. Chamber pressure must be <5.0x10e-6 in 1 min. Open chamber and change Load Lock double o-ring if pressure requirement is failed. (Under “Maintenance” menu select “Park System” and press “Park” to confirm)
