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Exhaust line leak causing bad smell

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Written by   30
1 year ago
Topics: Semicon, Technology

Share another past history of exhaust line choke and causing leak.

There was a feedback that the whole subfab was full of bad smell and after smell detector went through the whole subfab , was highly suspected the bad smell caused by this leak at the exhaust line.

The joint was not screwed tighly or over years, the connection loosened, you can clearly see a layer of yellowish thing came out from the line.

The choke line from another angle. Can see the powder overflow to outside the joint and accumulate at the heater jacket.

Top view of the exhaust line, can clearly see whole thing was quite long and hardened become black and yellowish.

example as below: the line is half-filled with powder, that's why suction is weak and overflow out and causing contamination, which is health hazard.

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Avatar for technician
Written by   30
1 year ago
Topics: Semicon, Technology
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