To confirm RS no drift. Today we did many stuffs:
<In all Auto-switch event onwards, to arrange the measurement for the GBT RS
measurement that the run is processed 3hrs AFTER A/S and 6S9 RS measurement
that the run is processed 6hrs AFTER A/S.> E.g. 8am A/S happened, measure the
IGBT run processed at 11am and 6S9 run processed at 2pm.
Not sure, pls verify with Nani.
PROCESS Alignment:
1. For all loading issue, add the loading op ID here to track. Willaim will compile
and share with PROD team.
OOC due to Loading Issue:
2. For incoming issue, need to alert to previous module / relevant stakeholders
officially by email communication.
3. Do not use Profiler Coil for THK tuning and Do not use H2M for RES tuning.
4. For the qual results, need to be shared thru passdown OR
email as official communication, not saved in common drive only.
5. For Back Transfer process, pls be reminded that the BT THK / DW qual is only
refer to F/L result. Test run result is not being considered <as per DPQ
system, we still need to key TR result> and team is working on APF system to
replace DPQ system.
NEW
6. For the intermittent loading issue, pls investigate the blackbox for the
lift down timing, life up timing and standby timing. Also, to check if the
operator did the wafer flat alignment at loading station OR at the workstation,
any PM activity for tool beside and etc. We will work out the package process
checklist for intermittent AVI OOC <based on fishbone analysis input>.
7. With immediate effect to stop any MFC Zeroing due to recent Res OOS case in
R919.
PROCESS ISSUES:
TC16K SUS 23/07 G1 Night XL
- So far TC16KXXXX RS issue rate 50%.
- As per Wourng we increased RS sampling from 1 sample/ day to 1
sample/shift for TC16wwwXXXX susceptor.
- Instructed above information to EGA GUI and informed production.
Busy work make you very tired and This is Very bad for mental and physical health that's also bad for Our Future so we avoid This type of activities