Start of the week, have to attend to major annual PM tasks.
Summary of today works are as below:
Calibrate backplane temps.
Calibrate process & backside gas
Calibrate RF & DC power
Remove wafer holders, clean and vacuum Load lock
Replace Load lock door O-ring
Dissemble Load lock rough line and vlean screen. Perform Helium leak check
ZERO all pod MFC
ZERO Load lock baratron
Zero Backside Baratrons
Set + 100 mv on all pod baratrons
Inspect All Water-Cooling Lines to Back Plane Heaters For Wear / Leaks
Inspect wafer handling and front end alignment
Check load arm latch pins
Elevator maintenance
Vacuum controller calibration
As today not many issues, able to focus and complete the tasks within 3hours.
Hopefully able to pay attention next time as well. details work come with concentration!
