Quantum Source (PCW) Purging Procedure. (All Stations Target Change)
Below is the diagram of whole machine:
First, Disconnect motor power connector for all stations. Disconnect drain line from pressure relief quick release fitting and connect to drain quick release fitting for all stations.
Secondly, Open drain ball valve & Install purge hose assembly. Ensure purge manual valve is closed.
Thirdly, Turn off PCW Supply ball valve. Also Turn off PCW Return ball valve.
Most importantly, Open purge manual valve slowly. Ensure PCW supply pressure is not more than 35 psi. Purge at least 5 mins.
Last but not least , Close purge manual valve. Quantum source purging is now complete.
Job done and proceed with PM.
Load and run recipe. Under “Wip” menu select “Start” to change system state to CAP (Continuous Automatic Processing) mode.
Need to press ‘Schedule WIP” menu and select recipe you want to run ie “Null process”. Press “Load/Unload” and determine the wafer slots number you wish to run.
Wait for the system to prompt you to load the metal cassette. Open load door and load the metal cassette then close load door .
System will automatically process the wafer. Wait the system to prompt you to unload the processed wafer and press “Unload”
Metal cassette will go to unload door. Open unload door and remove metal cassette. The system will automatically proceed to standby mode.
