Daily status tracking

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Written by
3 years ago
In community: Daily meals(c44c)

Start to track the food index for today

JETMOS Status :

F4_AU: 1,1,0,200

F4_NAU: 0,0,0,475

F3_IC: 1,0,0, 800

Gsmrc4 Au tgt chg.. Etch shield.wh.regen.rtp 12/12,1430

Gsmrc2 sput 3 DC power maestria.rtp 11pm

Jsmrc2 sput 3 power fault.rtp 1a

Power MRC Status:

T5_BZ: 0,1,0, 160

* T3_ALSI: 0,0,0, 321*

T5_ALSI_1S2: 0,0,0, 221

T3_SMODE: 0,0,0, 50

T5_SMODE: 0,0,0, 225

*T5_TIW_MEMS: 1,0,0 325*

T3_MRC_TIW : 0,0,0 150

1sec03 : Etch gate vlv close , cryo temp. high happen again. Change Etch cryo pump. RTP 11am

1sbz02 : Max run pm, RTP 6am

2etg01 : just down end shift, pls follow up

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Avatar for Sitisan
Written by
3 years ago
In community: Daily meals(c44c)

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