Annual PM for machine repair

Start of the week, have to attend to major annual PM tasks. Summary of today works are as below: Calibrate backplane temps. Calibrate process & backside gas  Calibrate RF & DC power  Remove wafer holders, clean and vacuum Load lock  Replace Load lock door O-ring  Dissemble Load lock rough line and vlean screen. Perform Helium leak check  ZERO all pod MFC  ZERO Load lock baratron  Zero Backside Baratrons  Set + 100 mv on all pod baratrons  Inspect All Water-Cooling Lines to Back Plane Heaters For Wear / Leaks  Inspect wafer handling and front end alignment  Check load arm latch pins  Elevator maintenance  Vacuum controller calibration   As today not many issues, able to focus and complete the tasks within 3hours. Hopefully able to pay attention next time as well. details work come with concentration!