Metal bump as liner crack A week start with reported product scrapped due to metal bump. And this sourced from the reason liner crack. As our QA feedback , 2 pieces previous rework product has failed their parameters, so these 2 products need to scrap inline. They have already inked off the affected for checking. crack line detected after back lapping. Defect detected 100% during AVI scan , tried to salvage with bump metal removal but did not survive in lapping step. No…
@technician in November 2020
Annual PM for machine repair Start of the week, have to attend to major annual PM tasks. Summary of today works are as below: Calibrate backplane temps. Calibrate process & backside gas Calibrate RF & DC power Remove wafer holders, clean and vacuum Load lock Replace Load lock door O-ring Dissemble Load lock rough line and vlean screen. Perform Helium leak check ZERO all pod MFC ZERO Load lock baratron Zero Backside Baratrons Set + 100 mv on all pod baratrons Inspect All…
LAN point cover damaged Everything can happen when you deal with production 24/7 line. For example, today when the production manager feedback to us that one operator was hurt by a dislocated LAN point cover.. So unusual things did happen time to time, a decent LAN point cover also can step and clash and deformed. Then the involved operator get hurt and get MC. While our tool side, the LAN plug deformed and affected the machine connectivity and fault out. Ciela vie , that's…
Gate valve to send out repair Second surprise of the day , nobody bother to send the faulty gate valve to repair! Gate valve functions as a separate valve to isolate whether to suck the gas through vacuum pump or shut off . So the mechanism is very simple, extend to shut the valve , or retract to let the vacuum pump to suck the foreline gases. So we always need to standby this part in case anyone spare down then can swop in. Stay tune for more machine stuff!
Exhaust line choke During a routine walk down then found this exhaust line rainbow color. Rainbow means something choke there, maybe due to the line bented , so the powder accumulated there easily and next slowly leak through from there over time. So no choice, but to schedule to down the tool and arrange with cleaning vendor for 1 day to clean up the choke part especially. Tool will be down because the pump will stop pumping down the residue gases. While waiting for the…
Exhaust line cleaning Last post I talked about the exhaust line need to clean periodically, some can last longer some shorter, all depend on the exhaust pressure gauge reading. If it drop lower, then it will be time to arrange for the cleaning job. Today I will talk about the situation when you encountered the exhaust line choking. First scenario and most common will be like this, white powder with the center only without any powder and the left over suction is through the…
Small accident Today a small accident happened , luckily is not big problem. That is a raise floor cover was misaligned and flip. The root cause we found due to the small little hinge was broken! too unlucky to the injured personnel. Accidents do happened anywhere , not much we can do but to be careful ourselves all the time, be it as simple as walking , do not drag your attention like talking over phone or seeing the phone et.
Exhaust line corrosion A little additional info for the previous post- exhaust line cleaning. Due to overlook every exhaust line condition timely, this line was fully choke until contaminated out from the tube and corroded. As you can see from the picture below, the yellow by-product was fully choke out the line. The remaining 1/8 space is super dupe weak for by-product to pass through. The corroded line unable to reuse anymore, but to make another new one for replacement.…
Exhaust pressure real time monitoring So last articles already told audience you all that problem we always faces in the production line. So instead of lettting the problem pop up by itself and caught us off guard, we decided to monitor the exhaust pressure in real time and set in system to trigger us exhaust pressure is dropping and prompt us to do the cleaning. We buy this Omega pressure monitor . And the S1 S2 & S3 dip switch able to toggle the setting you wish to…