Mid day report for new week

As monday morning, we need to update the status weekly report: Metal 2 ALCU strip wet resist Lots detected with bubble like defect at wafer edges during inspection (slot25,LM#04)-> at wafer right edges. #04 was scanned previously during Batching like AVI not capable of detecting this small bubble defect.   Slot25,LM#23)->at wafer edges. #23 was scanned previously during and passing with low count. Defect look like underlayer resist bubble/water stain happen during   poly/contact layer. Shadowish contact rainbowish colour observed.              Concurrently, there is one lot failing AVI OOC at CONTACI (#11/12=~39/38 count) with similar bubble stain localised at wafer right or left affecting 1 dies. Please help to perform AVI 100% and send lot for  rewash to see if stain can be removed.                                        Both lots released and advanced hold after Etch wet tantalum to perform 100% AVI scan to see if can detect.                           Please help to tag current 6 lots from poly level to scan 100%.        100% scan LM08-19 seen with same defect at the LHS/RHS edge. Lots sent for rewash but no improvement seen. Lot still on-hold  . <5 counts,no similar map all moved out.                                                            Advance hold at Pad to check if similar defect as WMK lots -> done scan 100% but cannot see the bubble defect.maj ul particles and false cnts.move to monitor yld as inst   MAX DELAY TRIGERRING FRM BOE TO TMAH                                          - If max delay>15min, error msg Peed001 Max delay exceeded will prompt out.   - to perform sample rework. If sample ok, to KEY REWORK ROUTE for other wafers    - NO MANUAL REWORK ALLOWED. To re-read the specific task and acknowledge.   Additional eSTAR alarm activation for BOE process . Estar will be activated if:-                                                               i)  Operator did not attend tool within 1min aft lots finish process, lots will         auto hold                                                                   ii)  Operator did not unload lots to tse within 1min, lots will auto hold