Mid day report 20 Sep

Today mid-day report are as below:

Lifting                                                                                                                 

Level:      Etch Wet Active                                                    

Summary:

1 lot seen with lifting after etch metal and suspect it is due to over etch at Etch Wet Active.  We raised NCL and moved the lot                                          

Lot on hold to do 100% T-84 testing due to NCL lot. 100%  .T4 testing done and passed, moved to monitor yield.   Unfortunatly, LM23  RES_MET_THIN value has difference compared to other LM.    

Batching TS2 Hold Proc                                                                                                                 

Summary:                                

Operator Ying Ing fdback STS2 running metal1 rcp but time not counting. And Techinician Yunis arrived & saw the rotor turning & time stuck on Step 18 3:13 drying step.                                                    

He stopped machine from running & unloaded wfrs. Put in white 50wafrr box.                                                              

We simulate together with technician how to recreate the time freezing & rotor still turning is by pressing HOLD PROC button.  Upon pressing this, alarm will be heard,& it had to be cleared to be erased from list of alarms/errors, hence suspect operator cleared the alarm.                                                               

Operator who ran wafrrs is Evelyin she's OT from G2. From   estar, process held 26mins into the recipe & ran 39mins more on the same cycle before stopping.                                          

Lots rewashed & no issue encountered. Inspected 5wfrs each lot can only see slight pitting worst on edges.                          

Requested human interview form from trainer & advance hold lot with msg ID "WOE NCL" before move out to confirm if ncl needed. 2lots ECD is in spec at slope etch level. NCL chopped