Mid day issue Today is relatively good day, issues are controlleabe: Lot prev hold for stain after EWITO strip resist,only saw the slight discoloration at the test pattern. Did not notice the suspected TIW lack at the edge dice. As checked by LSZ, got history of remask at mask ITO due to wrong dev pg used. Took photos of mask pattern for ITO/TIW lvls,& confirmed the affected pattern is TIW.chk tools but no downtime seen, refer to excel. No buddy lot at 5EWB03,run @bathlife…
@technician in October 2021
Mid day Issue - 14 October 2021 USYUL01 having PM1 Communication Error This machine encountered error PM1 not ready. Upon check found PM1 lost comm to the main frame. Reset machine and initialized but still PM1 unable to communicate. We remove power on PM1 controller and reset again, negative. Try change hdd from slave to master, -negative So we put back master hdd and tried swap line card on the controller. Upon removing IOB-80 card, found some burn mark on component…
Mid day issue report 21 Oct ****Tube06: EXTRACTCTON VOLTAGE ISSUE**** VESDA alarm activated due to burning smell and smoke from EXT resistor.We activated cleaned the holder and replaced the 3.9K Resistor.We also found Ext voltage stable only up to 55KV. Decided to Vent the source and found Bushing heavily coated. Cleaned away and replaced the source as the Arc chamber slit too wide and suspect required more gas than normal. At last, conditioned with Argon and then released…
Chronic issue resolved! There is this chronic issue that haunted us for many years, with the team efforts in finding rootcauses, today we finally able to conclude something out of it: Issue is High RS VS02. Test that we plotted to run our hypothesis: Run 6 t/w with different setup 1. I=0.63mA, IPFG=6A, RS=196.3 (1.42%) rem: clear scan map with 5 lines 2. I=0.63mA, IPFG=0.1A, RS=173.9 (0.42%) 3. I=0.63mA, PFG OFF, RS=174.4 (1.09%) rem: nonuniform oxide, RS should be lower 4.…