Daily status tracking Start to track the food index for today

JETMOS Status : F4_AU: 1,1,0,200 F4_NAU: 0,0,0,475 F3_IC: 1,0,0, 800 Gsmrc4 Au tgt chg.. Etch shield.wh.regen.rtp 12/12,1430 Gsmrc2 sput 3 DC power maestria.rtp 11pm Jsmrc2 sput 3 power fault.rtp 1a Power MRC Status: T5_BZ: 0,1,0, 160 * T3_ALSI: 0,0,0, 321* T5_ALSI_1S2: 0,0,0, 221 T3_SMODE: 0,0,0, 50 T5_SMODE: 0,0,0, 225 *T5_TIW_MEMS: 1,0,0 325* T3_MRC_TIW : 0,0,0 150 1sec03 : Etch gate vlv close , cryo temp. high happen again. Change Etch cryo pump. RTP 11am 1sbz02 : Max run pm, RTP 6am 2etg01 : just down end shift, pls follow up